Equipment

Electrical Equipment

The workstation for measurements and electronic analysis of devices and circuits consist of following components:

1. Probe station:
   • Analytical Wafer prober (8"-Chuck, Microscope laser ability)
   • Shielded dark box + shock and vibration free bench
   • 6 DC - Manipulators
   • 2 AC - Manipulators
2. DC measurement technique (Practical experience K4200):
   • 3 Electrometer (10fA, 100fA)
   • 2 Voltage sources
   • 2 Current sources
   • 1 Voltage/Current Power source (100W)
   • 2 Digital Multimeter
3. AC measurement technique:
   • CV-Analyzer
   • S-parameter measuring (Network analyzer 300K - 6GHz)
   • HF-Probes for on-wafer measurement 40GHz
   • HF-Probes for in-circuit measurement 350MHz
   • 4-channel DSO 500MHz
4. Low level noise measurement:
   • FFT Spectrum-Analyzer (476uHz - 100kHz, 5nVrms/sqrt(Hz), 90dB)
   • Noiseless Preamplifier with adjustable gain
   • Battery based biasing for MOS and Bipolar devices

The software to control this technique is written by self with some special features, so it is possible to adapt the measurement program to the respective problem and the interface is independent from any measurement device supplier.

All this measurement equipment are connected via the IEEE488-Bus / Ethernet to the DAnalyse Intranet and has an large amount of storage and documentation ability. Beside this, the following data acquisition under use of the Extraction software Extraction software can work on powerful computer in the decentral network.